Aikace-aikace da ci gaban bincike na SiC shafi a cikin carbon / carbon thermal filin kayan don monocrystalline silicon-2

1 Aikace-aikace da ci gaban bincike na siliki carbide shafi a cikin kayan filin zafi na carbon/carbon

1.1 Aikace-aikace da ci gaban bincike a cikin shirye-shiryen crucible

A cikin filin thermal crystal guda ɗaya, dacarbon / carbon cruciblegalibi ana amfani dashi azaman jirgin ruwa don kayan siliki kuma yana cikin hulɗa daquartz crucible, kamar yadda aka nuna a cikin Hoto 2. Yanayin aiki na carbon / carbon crucible ne game da 1450 ℃, wanda aka hõre biyu yashwa na m silicon (silicon dioxide) da silicon tururi, kuma a karshe crucible ya zama bakin ciki ko yana da zobe crack. , wanda ya haifar da gazawar crucible.

An shirya wani abin rufe fuska na carbon/carbon composite crucible ta hanyar sinadari mai tururi da kuma yanayin da ake ciki. Rufin da aka haɗa ya ƙunshi murfin silicon carbide (100 ~ 300μm), shafi na silicon (10 ~ 20μm) da kuma murfin silicon nitride (50 ~ 100μm), wanda zai iya hana lalatawar tururin silicon a cikin farfajiyar ciki na carbon / carbon composite. crucible. A cikin tsarin samarwa, asarar abin da ke tattare da carbon / carbon composite crucible shine 0.04 mm a kowace tanda, kuma rayuwar sabis na iya kaiwa sau 180.

Masu binciken sun yi amfani da hanyar amsa sinadarai don samar da suturar silikon carbide iri ɗaya a saman ƙwanƙolin carbon / carbon composite crucible a ƙarƙashin wasu yanayin zafin jiki da kuma kariyar iskar gas, ta yin amfani da silicon dioxide da silicon karfe azaman albarkatun ƙasa a cikin yanayin zafi mai zafi. tanderu. Sakamakon ya nuna cewa babban maganin zafin jiki ba kawai yana inganta tsabta da ƙarfin sic ɗin ba, amma har ma yana inganta haɓakar juriya na farfajiyar carbon / carbon composite, kuma yana hana lalatawar crucible ta hanyar SiO vapor. da maras tabbas na oxygen atom a cikin tanderun silicon monocrystal. Rayuwar sabis na crucible yana ƙaruwa da 20% idan aka kwatanta da na crucible ba tare da suturar sic ba.

1.2 Aikace-aikacen da ci gaban bincike a cikin bututun jagorar kwarara

Silinda jagora yana sama da crucible (kamar yadda aka nuna a hoto 1). A cikin aiwatar da ja da lu'ulu'u, bambancin zafin jiki tsakanin ciki da wajen filin yana da girma, musamman ma saman ƙasa yana kusa da narkakkar kayan siliki, zafin jiki shine mafi girma, kuma lalata da tururin silicon shine mafi tsanani.

Masu bincike sun ƙirƙira wani tsari mai sauƙi da kuma juriya mai kyau na iskar shaka na jagorar bututu anti-oxidation shafi da hanyar shiri. Da farko, wani Layer na silicon carbide whisker yana cikin-wuri wanda aka girma akan matrix na bututun jagora, sannan kuma an shirya babban Layer na silicon carbide na waje, don haka an kafa wani Layer na SiCw tsakanin matrix da madaidaicin silin carbide surface Layer. , kamar yadda aka nuna a cikin Hoto 3. Ƙimar haɓakar haɓakar thermal ya kasance tsakanin matrix da silicon carbide. Zai iya rage yawan zafin zafi da ya haifar da rashin daidaituwa na haɓakar haɓakar thermal.

Binciken ya nuna cewa tare da karuwar abun ciki na SiCw, girman da adadin raguwa a cikin rufin ya ragu. Bayan 10h hadawan abu da iskar shaka a cikin 1100 ℃ iska, da nauyi asara kudi na shafi samfurin ne kawai 0.87% ~ 8.87%, da hadawan abu da iskar shaka juriya da thermal buga juriya na silicon carbide shafi ne ƙwarai inganta. Dukkanin tsarin shirye-shiryen an kammala ci gaba ta hanyar jigilar sinadarai na sinadarai, shirye-shiryen siliki carbide shafi yana sauƙaƙa sosai, kuma an ƙarfafa cikakken aikin duka bututun ƙarfe.

Masu binciken sun ba da shawarar wata hanyar ƙarfafa matrix da shafi saman bututun jagorar graphite don silicon monocrystal czohr. The samu silicon carbide slurry aka uniformly mai rufi a saman graphite jagora tube tare da shafi kauri na 30 ~ 50 μm ta goga shafi ko fesa shafi Hanyar, sa'an nan kuma sanya shi a cikin wani babban zafin jiki tanderun for in-situ dauki, da dauki zazzabi. ya kasance 1850 ~ 2300 ℃, kuma adana zafi ya kasance 2 ~ 6h. Ana iya amfani da Layer na waje na SiC a cikin tanderun girma na 24 in (60.96 cm) guda ɗaya na crystal girma, kuma yawan zafin jiki na amfani shine 1500 ℃, kuma an gano cewa babu fashewa da fadowa foda a saman silinda jagorar graphite bayan 1500h .

1.3 Aikace-aikacen da ci gaban bincike a cikin silinda mai rufi

A matsayin ɗaya daga cikin mahimman abubuwan da ke cikin tsarin filin thermal silicon monocrystalline, ana amfani da silinda mai rufewa don rage asarar zafi da sarrafa yanayin zafin yanayin filin zafi. A matsayin wani yanki mai goyan bayan rufin rufin bangon ciki na tanderun kristal guda ɗaya, lalatawar siliki yana haifar da faduwa da faɗuwar samfurin, wanda a ƙarshe yana haifar da gazawar samfur.

Don ƙara haɓaka juriya na ruɓar siliki na C / C-sic composite insulation tube, masu binciken sun sanya samfuran C / C-sic composite insulation bututu a cikin tanderun sinadarai, kuma sun shirya murfin silicon carbide mai yawa akan saman C/C-sic composite insulation bututu kayayyakin ta sinadaran tururi jijiya tsari. Sakamakon ya nuna cewa, Tsarin zai iya hana lalata fiber na carbon a kan ainihin C / C-sic composite ta silicon tururi, da kuma lalata juriya na silicon tururi yana karuwa da sau 5 zuwa 10 idan aka kwatanta da carbon / carbon composite, da kuma rayuwar sabis na silinda mai rufi da amincin yanayin filin zafi suna inganta sosai.

2.Kammalawa da fatawa

Silicon carbide shafiAna ƙara yin amfani da shi sosai a cikin kayan filin filin carbon / carbon thermal saboda kyakkyawan juriya na iskar shaka a babban zafin jiki. Tare da ƙara girman girman carbon / carbon thermal filin kayan amfani da monocrystalline silicon samar, yadda za a inganta uniformity na silicon carbide shafi a saman thermal filin kayan da inganta rayuwar sabis na carbon / carbon thermal filin kayan ya zama wani gaggawa matsala. a warware.

A gefe guda, tare da haɓaka masana'antar siliki ta monocrystalline, buƙatun kayan aikin filin zafi mai tsafta shima yana ƙaruwa, kuma SiC nanofibers kuma suna girma akan filayen carbon na ciki yayin amsawa. Ƙaƙƙarfan ƙaƙƙarfan ƙaƙƙarfan ƙaƙƙarfan ƙima da ƙima na C / C-ZRC da C / C-sic ZrC composites waɗanda aka shirya ta gwaje-gwaje sune -0.32 mg / s da 2.57 μm / s, bi da bi. Matsakaicin adadin yawan adadin abubuwan da aka haɗa da C/ C-sic-ZrC sune -0.24mg/s da 1.66 μm/s, bi da bi. Haɗin C/C-ZRC tare da SiC nanofibers suna da mafi kyawun kaddarorin ablative. Daga baya, za a yi nazarin tasirin maɓuɓɓugar carbon daban-daban akan haɓakar SiC nanofibers da kuma tsarin SiC nanofibers waɗanda ke ƙarfafa kaddarorin abubuwan ɓoye na abubuwan haɗin C/C-ZRC.

An shirya wani abin rufe fuska na carbon/carbon composite crucible ta hanyar sinadari mai tururi da kuma yanayin da ake ciki. Rufin da aka haɗa ya ƙunshi murfin silicon carbide (100 ~ 300μm), shafi na silicon (10 ~ 20μm) da kuma murfin silicon nitride (50 ~ 100μm), wanda zai iya hana lalatawar tururin silicon a cikin farfajiyar ciki na carbon / carbon composite. crucible. A cikin tsarin samarwa, asarar abin da ke tattare da carbon / carbon composite crucible shine 0.04 mm a kowace tanda, kuma rayuwar sabis na iya kaiwa sau 180.