Aikace-aikace da ci gaban bincike na SiC shafi a cikin carbon / carbon thermal filin kayan don monocrystalline silicon-1

Ƙirƙirar wutar lantarki ta hasken rana ta zama sabuwar masana'antar makamashi da ta fi dacewa a duniya. Idan aka kwatanta da polysilicon da amorphous silicon hasken rana Kwayoyin, monocrystalline silicon, a matsayin photovoltaic samar da kayan aiki, yana da high photovoltaic canji yadda ya dace da kuma fice kasuwanci abũbuwan amfãni, kuma ya zama na al'ada na hasken rana photovoltaic ikon samar. Czochralski (CZ) yana daya daga cikin manyan hanyoyin da za a shirya silicon monocrystalline. Abubuwan da ke cikin tanderun monocrystalline na Czochralski sun haɗa da tsarin wutar lantarki, tsarin injin, tsarin gas, tsarin filin zafi da tsarin kula da lantarki. Tsarin filin thermal yana ɗaya daga cikin mahimman yanayi don haɓaka silicon monocrystalline, kuma ingancin siliki monocrystalline yana tasiri kai tsaye ta hanyar rarraba yanayin zafin jiki na filin thermal.

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Abubuwan filin thermal sun ƙunshi kayan aikin carbon (kayan graphite da kayan haɗin carbon / carbon), waɗanda aka raba zuwa sassan tallafi, sassa masu aiki, abubuwan dumama, sassan kariya, kayan kariya na thermal, da sauransu, gwargwadon ayyukansu, kamar yadda yake. wanda aka nuna a cikin Hoto 1. Yayin da girman siliki na monocrystalline ya ci gaba da karuwa, girman buƙatun don abubuwan haɗin filin thermal kuma suna karuwa. Abubuwan haɗin carbon/carbon sun zama zaɓi na farko don kayan filin thermal don silicon monocrystalline saboda girman girman girmansa da kyawawan kaddarorin inji.

A cikin aiwatar da czochralcian monocrystalline silicon, narkewar kayan siliki zai haifar da tururi na silicon da zubewar siliki, wanda ke haifar da lalatawar silicification na kayan filin thermal na carbon / carbon, da kayan aikin injiniya da rayuwar sabis na kayan filin carbon / carbon thermal. abin ya shafa sosai. Saboda haka, yadda za a rage silicification yashewar carbon/carbon thermal kayan filin da inganta rayuwarsu sabis ya zama daya daga cikin na kowa damuwa masana'antun silicon monocrystalline da carbon/carbon thermal filin kayan masana'antun.Silicon carbide shafiya zama na farko zabi ga surface shafi kariya na carbon / carbon thermal filin kayan saboda da kyau kwarai thermal girgiza juriya da lalacewa juriya.

A cikin wannan takarda, farawa daga kayan aikin filin carbon / carbon thermal da aka yi amfani da su a cikin samar da silicon monocrystalline, ana gabatar da manyan hanyoyin shirye-shiryen, fa'idodi da rashin amfani na murfin silicon carbide. A kan wannan tushen, aikace-aikace da ci gaban bincike na silicon carbide shafi a cikin carbon / carbon thermal filin kayan ana duba bisa ga halaye na carbon / carbon thermal filin kayan, da shawarwari da kuma ci gaban kwatance domin surface shafi kariya na carbon / carbon thermal filin kayan. ana sa gaba.

1 Fasahar shirye-shirye nasilicon carbide shafi

1.1 Hanyar haɗawa

Ana amfani da hanyar haɗawa sau da yawa don shirya rufin ciki na silicon carbide a cikin tsarin kayan haɗin C / C-sic. Wannan hanya ta farko tana amfani da foda mai gauraya don nannade kayan haɗin carbon/carbon, sannan ta aiwatar da maganin zafi a wani yanayin zafi. Jerin hadaddun halayen physico-sunadarai suna faruwa tsakanin foda mai gauraya da saman samfurin don samar da sutura. Amfaninsa shi ne cewa tsari yana da sauƙi, kawai tsari guda ɗaya zai iya shirya kayan matrix masu yawa, marasa fasa; Canjin ƙananan girman daga preform zuwa samfurin ƙarshe; Ya dace da kowane tsarin ƙarfafa fiber; Za'a iya samar da wani nau'i mai nau'i mai nau'i a tsakanin sutura da substrate, wanda aka haɗa da kyau tare da substrate. Koyaya, akwai kuma rashin amfani, kamar halayen sinadarai a babban zafin jiki, wanda zai iya lalata fiber ɗin, da haɓakar kayan aikin carbon/carbon matrix. Daidaitawar rufin yana da wuyar sarrafawa, saboda dalilai irin su nauyi, wanda ya sa suturar ta zama mara kyau.

1.2 Hanyar shafawa

Hanyar suturar slurry ita ce haɗuwa da kayan shafa da kuma ɗaure a cikin cakuda, ko'ina a kan saman matrix, bayan bushewa a cikin yanayin da ba shi da kyau, samfurin da aka rufe yana da zafi mai zafi, kuma ana iya samun abin da ake bukata. Abubuwan amfani shine cewa tsari yana da sauƙi kuma mai sauƙi don aiki, kuma kauri mai laushi yana da sauƙin sarrafawa; Rashin hasara shi ne cewa akwai rashin ƙarfin haɗin kai tsakanin sutura da ma'auni, kuma ƙarfin juriya na thermal na sutura ba shi da kyau, kuma daidaitattun sutura yana da ƙasa.

1.3 Hanyar amsawar tururi

Hanyar tururi na siliki (CVR) hanya ce ta tsari wacce ke fitar da siliki mai ƙarfi zuwa tururin silicon a wani yanayin zafi, sannan tururin silicon ya bazu cikin ciki da saman matrix, kuma yana amsawa a wurin tare da carbon a cikin matrix don samarwa. siliki carbide. Fa'idodinsa sun haɗa da yanayi iri ɗaya a cikin tanderun, daidaitaccen ƙimar amsawa da kauri daga kayan da aka rufe a ko'ina; Tsarin yana da sauƙi kuma mai sauƙi don aiki, kuma ana iya sarrafa kauri mai rufi ta hanyar canza matsa lamba na siliki, lokacin ajiya da sauran sigogi. Rashin hasara shi ne cewa samfurin yana da matukar tasiri ga matsayi a cikin tanderun, kuma matsa lamba na siliki a cikin tanderun ba zai iya kaiwa daidaitattun ka'idar ba, wanda ya haifar da kauri mara kyau.

1.4 Hanyar sanya tururi na sinadari

Chemical tururi Deposition (CVD) wani tsari ne wanda ake amfani da hydrocarbons azaman tushen iskar gas da kuma babban tsabta N2/Ar azaman iskar gas don shigar da gauraye da iskar gas a cikin injin tururi na sinadarai, kuma hydrocarbons suna bazuwa, haɗa su, watsawa, tallatawa kuma an warware su ƙarƙashin ƙasa. wasu zafin jiki da matsa lamba don samar da ingantattun fina-finai akan saman abubuwan haɗin carbon/carbon. Amfaninsa shine cewa za'a iya sarrafawa da yawa da tsabta na sutura; Har ila yau, ya dace da kayan aiki tare da siffar da ya fi rikitarwa; Za'a iya sarrafa tsarin crystal da yanayin yanayin samfurin ta hanyar daidaita sigogin ajiya. Abubuwan da ba su da lahani su ne cewa adadin ajiyar kuɗi ya yi ƙasa da ƙasa, tsarin yana da wuyar gaske, farashin samarwa yana da yawa, kuma ana iya samun lahani na sutura, irin su fasa, lahani da lahani.

A taƙaice, hanyar haɗawa ta iyakance ga halayen fasaha, wanda ya dace da haɓakawa da samar da dakin gwaje-gwaje da ƙananan kayan aiki; Hanyar sutura ba ta dace da samar da yawa ba saboda rashin daidaituwa. Hanyar CVR na iya saduwa da yawan samar da samfurori masu girma, amma yana da buƙatu mafi girma don kayan aiki da fasaha. Hanyar CVD hanya ce mai kyau don shiryawaFarashin SIC, amma farashin sa ya fi hanyar CVR saboda wahalarsa wajen sarrafa tsari.


Lokacin aikawa: Fabrairu-22-2024
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