Mai riƙe Wafer Substrate Substrate don PECVD

Riƙen Wafer Substrate na Hotuna don Fitaccen Hoton PECVD

Takaitaccen Bayani:

VET Energy's Graphite Substrate Holder an ƙera shi don kiyaye jeri na wafer da kwanciyar hankali a cikin tsarin PECVD, hana gurɓatawa da rage haɗarin lalacewa. Mai riƙe Wafer ɗin Graphite yana ba da amintacce, ko da dandamali, yana tabbatar da cewa wafers ana fallasa su daidai gwargwado ga plasma don daidaito da ƙima mai inganci. Tare da babban ƙarfin wutar lantarki da ƙarfin gaske, wannan mariƙin yana taimakawa haɓaka ingantaccen tsari gaba ɗaya da aikin samfur.

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Cikakken Bayani

Tags samfurin

VET Energy Graphite Substrate Wafer Holder wani madaidaicin dillali ne wanda aka ƙera don tsari na PECVD (Plasma Enhanced Chemical Vapor Deposition). Wannan madaidaicin mai ɗaukar hoto mai inganci an yi shi da tsafta mai ƙarfi, kayan zane mai girma, tare da kyakkyawan juriya na zafin jiki, juriyar lalata, kwanciyar hankali da sauran halaye. Zai iya samar da ingantaccen dandamali na tallafi don aiwatar da PECVD kuma tabbatar da daidaituwa da kwanciyar hankali na jigilar fim.

VET Energy PECVD tsarin graphite wafer goyan bayan tebur yana da halaye masu zuwa:

▪Babban tsarki:ƙananan ƙarancin ƙazanta, guje wa gurɓataccen fim, tabbatar da ingancin fim.

▪Babban yawa:high yawa, high inji ƙarfi, iya jure high zafin jiki da kuma high matsa lamba PECVD yanayi.

▪Kyakkyawan kwanciyar hankali:ƙananan canje-canje a babban zafin jiki, tabbatar da kwanciyar hankali na tsari.

▪Kyakkyawan thermal conductivity:yadda ya kamata canja wurin zafi don hana wafer overheating.

▪Juriya mai ƙarfi mai ƙarfi:na iya tsayayya da zaizayar da iskar gas iri-iri da plasma.

▪Sabis na musamman:graphite goyon bayan tebur na daban-daban masu girma dabam da kuma siffofi za a iya musamman bisa ga abokin ciniki bukatun.

Amfanin Samfur

▪Inganta ingancin fim:Tabbatar shigar da fim iri ɗaya da inganta ingancin fim.

▪Tsawaita rayuwar kayan aiki:Kyakkyawan juriya na lalata, haɓaka rayuwar sabis na kayan aikin PECVD.

▪Rage farashin samarwa:Babban ingantattun tran ɗin graphite na iya rage raguwar tarkace da rage farashin samarwa.

Abubuwan graphite daga SGL:

Na yau da kullun: R6510
Fihirisa	Gwaji misali	Daraja	Naúrar
Matsakaicin girman hatsi	ISO 13320	10	μm
Yawan yawa	DIN IEC 60413/204	1.83	g/cm³
Bude porosity	Farashin 66133	10	%
Girman pore matsakaici	Farashin 66133	1.8	μm
Lalacewa	Farashin 51935	0.06	cm²/s
Rockwell taurin HR5/100	DIN IEC60413/303	90	HR
Takamaiman tsayayyar wutar lantarki	DIN IEC 60413/402	13	μΩm
Ƙarfin sassauƙa	DIN IEC 60413/501	60	MPa
Ƙarfin matsi	Farashin 51910	130	MPa
Modules na matasa	Farashin 51915	11.5×10³	MPa
Thermal fadada (20-200 ℃)	Farashin 51909	4.2X10^-6	K^-1
Thermal conductivity (20 ℃)	Farashin 51908	105	Wm^-1K^-1

An ƙirƙira shi musamman don ƙirar ƙirar hasken rana mai inganci, yana tallafawa sarrafa wafer mai girma G12. Ingantacciyar ƙira mai ɗaukar kaya yana ƙaruwa sosai da fitarwa, yana ba da damar ƙimar yawan amfanin ƙasa da ƙananan farashin samarwa.

Abu	Nau'in	Mai ɗaukar waya mai lamba
Jirgin ruwan PEVCD Grephite - Jerin 156	156-13 grephite jirgin ruwa	144
	156-19 grephite jirgin ruwa	216
	156-21 grephite jirgin ruwa	240
	156-23 graphite jirgin ruwa	308
Jirgin ruwan PEVCD Grephite - Jerin 125	125-15 grephite jirgin ruwa	196
	125-19 grephite jirgin ruwa	252
	125-21 jirgin ruwan graphite	280